ABB UFC911B106 3BHE037864R0106 Marine Spare Parts Power Plant Chemical Plant Module

Description

UFC911B106 vacuum robot is a robot working in a vacuum environment, which is mainly used in the semiconductor industry to realize the transmission of wafers in the vacuum chamber. The vacuum manipulator is difficult to import, limited, large in use, and has strong versatility. It has become a key component that restricts the R&D progress and product competitiveness of semiconductor equipment. In addition, foreign countries have strictly reviewed Chinese buyers, and they belong to the prohibited product catalog. The vacuum manipulator has become a “choke” problem that seriously restricts the manufacturing of complete semiconductor equipment in China. Direct drive vacuum robot technology belongs to original innovative technology.

The key technologies of UFC911B106 include:
(1) New configuration design technology of vacuum robot: through structural analysis and optimization design, avoid international patents, and design new configurations to meet the requirements of the vacuum robot for stiffness and expansion ratio;
(2) Large gap vacuum direct drive motor technology: involving the theoretical analysis, structural design, manufacturing process, surface treatment of motor materials, low-speed high torque control, small multi axis driver and other aspects of large gap vacuum direct drive motor and high clean direct drive motor.
(3) The design of multi axis precision shafting in vacuum environment. The design method of shaft in shaft is adopted to reduce the problems of misalignment between shafts and asymmetry of inertia.
(4) Dynamic trajectory correction technology: through the fusion of sensor information and robot motion information, the offset between the reference position of the wafer and the finger can be detected, and through the dynamic correction of the motion trajectory, the robot can accurately transfer the wafer from one station in the vacuum chamber to another.
(5) Vacuum robot language in line with SEMI standard: complete the special language for vacuum robot according to the requirements of vacuum robot handling, robot operation characteristics and SEMI standard.
(6) Reliability system engineering technology: In IC manufacturing, equipment failure will bring huge losses. According to the high requirements of semiconductor equipment for MCBF, the reliability of each component is tested, evaluated and controlled to improve the reliability of each component of the manipulator, so as to ensure that the manipulator meets the high requirements of IC manufacturing.

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